Customer: Triple-O
Task: Enclosure technology for complex microscope guidance


The NanoLyser 300 by Triple-0 is suitable for the fault analysis in the semiconductor manufacture as well as the examination of magnetic storage media (b) Semiconductor structure with a an edge length of 35 x 35 µm




The basis was formed by Schroff’s compact 19” small cabinet ‘minirack’




On the rear door which has heavy drivers for stepping motors fixed to it, special hinges strengthen the stability.




Schroff cable duct  simplifies tidy cable guiding.
Raster power microscopy is a science in itself and like many specialist areas today requires extensive and very specific ‘Know how’. The Potsdamer company Triple-O Microscopy GmbH represents a leading producer in this market and offers for the first time with its raster power microscope ManoLyser 300, a microscope, which is not only suitable for scientific research but also for industrial applications. The areas of application reach from the fault analysis of 300mm (12 inch) wafers in semiconductor manufacturing to the quantitative examination of magnetic storage media. Here the NanoLyser supports the development, the prototype manufacture as well as the quality control.

The development of this microscope required the undivided attention of the Triple-0 team of engineers. With regard to the enclosure technique for the complex electronic guidance of the sensitive measuring methods the company sought the advice on an expert, the Pentair Technical Products Group Europe.

Integration service for electronic packaging

With their extensive integration service the electronic packaging specialist was able to service the customer during the complete life cycle of an enclosure and cases project from the specification and construction via purchasing, prototype manufacture, tests and examinations up to the actual product manufacture. During this process the enclosure professional integrates all necessary basic elements of electronic packaging, like backplanes, climate control, power supply, EMC-measures and cabling which are assembled from mechanical and electronic components of the brands Schroff and Hoffman. This way customers receive a sort of Plug&Play product for their 19” technique.

The advantages of this offer are many fold. Integration service users do not have to buy all of their individual components for their installation from different manufacturers or they do not have to develop their own additional specific products and they do not have to assemble the elements of a system. This process is time consuming, expensive and at the same time subject to problems. There are not only compatibility problems in the installation and test phases on the agenda, but often the capacities are not available for the professional realisation and manufacture or there is a lack of experience. Difficulties arise especially with smaller projects with regards to cost effective procurement and storage.

Raster power microscopy has high demands

We would like to use our own precious resources as much as possible, explains Volker Dworak, Manager of Development and Production at Triple-0, and have decided, to outsource the enclosure technique with all its facets, so that we are able to concentrate on our core competence, the raster power microscopy. The measurement with the raster power microscopy requires an extremely high grade of precision, says Volker Dworak. We have high demands for the signal quality and with this of the complete measure, guidance and regulation technique of the system. The functionality of our technique to a large extend also depends on the electronic packaging system. Therefore we are reliant on the best possible support.

On the way to a marketable product

With these demands Triple-0 has approached Pentair Technical Products and together both parties have found an enclosure solution, which has been tailored to the requirements of the customer and at the same time as an especially manufactured product does not exceed price limits. In a discussion with the application engineers at Pentair Technical Products the critical points were quickly apparent. The original plastic enclosure did not guarantee sufficient stability. Two drivers for the stepping motor of the x-y-table that are fixed to the rear panel each weigh 12 kg and encumber the total system to a large extent. Therefore at first a stable cabinet frame was chosen out of Schorff’s standard product range. The 19” small cabinets ‘minirack’ are available in a height of 6U to 34U and consist of two Aluminium die cast frames and four Aluminium vertical uprights. This structure allows for a load bearing capacity of 200 kg in total. A especially strengthened hinge provides sufficient stability of up to 24kg load bearing capacity for the rear door when it is open.

In principle with the 3U cabinet the power supply for the guidance electronics (for ± 5V, ± 15V, ± 24V) as well as the motors (160V AC)are situated at the base of the cabinet. Above it are the subracks with backplanes for the slotting in of boards, which take up a height of 9U (3 x 3U).

Complete integration

In the framework of the project Pentair Technical Products not only delivers the cabinet, subracks, backplanes, power supplies, guide rails and fans, but also integrates the various components into the cabinet and carries out the complete cabling. Furthermore the enclosure experts receive additional components for installation, like signal boards or drivers for the stepping motors for the rear door. We are glad that we do not have to get involved in the detailed assembly components like plugs, cables etc., says Jörn Selbeck. Pentair Technical Products hands us a cabinet which has been adapted to our needs, in which we only have to slot in our boards. It can not be simpler. We are banking on continued good co-operation in the future.

FAKTEN:

  • Development of an
        integrated system


  • High flexibility through
        various assembly stages


  • Development from
        standard products


  • Competitively priced